REACTIVE COEVAPORATION SYNTHESIS AND CHARACTERIZATION OF SRTIO3 THIN-FILMS

被引：46

作者：

YAMAGUCHI, H

MATSUBARA, S

MIYASAKA, Y

机构：

[1] Fundamental Research Laboratories, NEC Corporation, Miyamae-ku Kawasaki, 216

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 9B期

关键词：

REACTIVE COEVAPORATION; CAPACITOR; DIELECTRIC CONSTANT; FERROELECTRIC THIN FILM;

D O I：

10.1143/JJAP.30.2197

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

SrTiO3 thin films were prepared by the reactive coevaporation method, where the Ti and Sr metals were evaporated in oxygen ambient with an E-gun and K-cell, respectively. A uniform depth profile in composition was achieved by altering the Ti evaporation rate according to the Sr evaporation rate change. A typical dielectric constant of 170 was measured on films of 75 nm in thickness. The in-situ annealing in oxygen plasma reduced the leakage current.

引用

页码：2197 / 2199

页数：3

共 4 条

[1] N-TYPE SRTIO3 THIN-FILMS - ELECTRONIC PROCESSES AND PHOTOELECTROCHEMICAL BEHAVIOR [J].