THE EFFECT OF HYDROGEN CONTENT ON THE OPTOELECTRONIC PROPERTIES OF AMORPHOUS SILICON-CARBIDE FILMS

被引：23

作者：

GIRGINOUDI, D

THANAILAKIS, A

机构：

[1] Laboratory of Electrical and Electronic Materials Technology, Department of Electrical Engineering, Democritus University of Thrace, 67100, Xanthi

来源：

JOURNAL OF APPLIED PHYSICS | 1991年 / 69卷 / 03期

关键词：

D O I：

10.1063/1.347237

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The optoelectronic properties of rf sputtered hydrogenated amorphous silicon-carbide thin films were investigated by optical and infrared absorption, photoconductivity, photoluminescence (PL), and electron spin resonance studies as a function of the hydrogen content. The results show that the hydrogen content has a very significant effect on the optical band gap and the photoconductivity of these films. The increased intensity of the PL spectra with an increase in the hydrogen content is very well correlated with the corresponding decrease in the spin density.

引用

页码：1490 / 1493

页数：4

共 19 条

[1] VIBRATIONAL-SPECTRA OF HYDROGEN IN SILICON AND GERMANIUM [J].

CARDONA, M .

PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 118 (02) :463-481

[2]

CATALANO A, 1982, IEEE PHOTOVOLTAIC SP, V16, P1421

[3]

HAMAKAWA Y, 1985, MATER RES SOC S P, V49, P239

[4]

Kaneko S., 1982, International Electron Devices Meeting. Technical Digest, P328

[5]

MATSUMOTO Y, 1983, J NONCRYST SOLIDS, V59, P345

[6] DEFECTS IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY-FILMS PREPARED BY GLOW-DISCHARGE DECOMPOSITION AND SPUTTERING [J].

MORIMOTO, A ;

MIURA, T ;

KUMEDA, M ;

SHIMIZU, T .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :7299-7305

[7] ANNEALING AND CRYSTALLIZATION PROCESSES IN TETRAHEDRALLY BONDED BINARY AMORPHOUS-SEMICONDUCTORS [J].

MORIMOTO, A ;

KATAOKA, T ;

KUMEDA, M ;

SHIMIZU, T .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1984, 50 (04) :517-537

[8] ELECTRO-LUMINESCENCE IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY [J].

MUNEKATA, H ;

KUKIMOTO, H .

APPLIED PHYSICS LETTERS, 1983, 42 (05) :432-434

[9] COMPOSITION-DEPENDENT STOKES SHIFT OF PHOTO-LUMINESCENCE IN AMORPHOUS SIXC1-X [J].

MUNEKATA, H ;

SHIOZAKI, A ;

KUKIMOTO, H .

JOURNAL OF LUMINESCENCE, 1981, 24-5 (NOV) :43-46

[10]

NAKANO S, 1985, MATER RES SOC S P, V49, P275

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