HIGH ELECTRON-MOBILITY IN ALGAAS/GAAS MODULATION-DOPED STRUCTURES

被引:56
作者
SAKU, T
HIRAYAMA, Y
HORIKOSHI, Y
机构
[1] NTT Basic Research Laboratories, Musashino-shi, Tokyo
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1991年 / 30卷 / 05期
关键词
MBE; MODULATION-DOPED STRUCTURE; ELECTRON MOBILITY; BALLISTIC TRANSPORT;
D O I
10.1143/JJAP.30.902
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlGaAs/GaAs modulation-doped structures with low-temperature electron mobility exceeding 10(7) cm2/Vs at a carrier concentration of 2.5 approximately 3 x 10(11) cm-2 are grown by molecular beam epitaxy. Electron mobility above 8 x 10(6) cm2/Vs is reproducibly obtained over more than 6 months by careful baking of the growth system and optimization of the layer structure. Voltage-current measurements showing nonlinear and negative resistance characteristics at low temperatures indicate that the ballistic motion of electrons dominates the transport characteristics of these samples.
引用
收藏
页码:902 / 905
页数:4
相关论文
共 47 条
[1]   Limit of electron mobility in AlGaAs/GaAs modulation-doped heterostructures [J].
Saku, T ;
Horikoshi, Y ;
Tokura, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (1A) :34-38
[2]   Electron nonelastic scattering by confined and interface polar optical phonons in a modulation-doped AlGaAs/GaAs/AlGaAs quantum well [J].
K. Požela .
Semiconductors, 2001, 35 :1305-1308
[3]   Scattering and electron mobility in combination-doped HFET-structures AlGaAs/InGaAs/AlGaAs with high electron density [J].
R. A. Khabibullin ;
I. S. Vasil’evskii ;
G. B. Galiev ;
E. A. Klimov ;
D. S. Ponomarev ;
R. A. Lunin ;
V. A. Kulbachinskii .
Semiconductors, 2011, 45 :1321-1326
[4]   Channel width dependence of mobility in Ge channel modulation-doped structures [J].
Irisawa, T ;
Miura, H ;
Ueno, T ;
Shiraki, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (4B) :2694-2696
[5]   Electron mobility in a AlGaAs/GaAs/AlGaAs quantum well [J].
V. G. Mokerov ;
G. B. Galiev ;
J. Pozela ;
K. Pozela ;
V. Juciene .
Semiconductors, 2002, 36 :674-678
[6]   Temperature dependence of electron redistribution in modulation-doped InAs/GaAs quantum dots [J].
Zhang, YC ;
Huang, CJ ;
Liu, FQ ;
Xu, B ;
Ding, D ;
Jiang, WH ;
Li, YF ;
Ye, XL ;
Wu, J ;
Chen, YH ;
Wang, ZG .
JOURNAL OF CRYSTAL GROWTH, 2000, 219 (03) :199-204
[7]   Improved Two Dimensional Electron Mobility in Asymmetric Barrier Delta-Doped AlGaAs/GaAs Inverted MODFET Structures [J].
Das, Sudhakar ;
Satpathy, Swati L. ;
Nayak, Rasmita K. ;
Panda, Ajit K. ;
Sahu, Trinath .
PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON DEVICES, CIRCUITS AND SYSTEMS (ICDCS) 2016, 2016, :128-+
[8]   GaAs/AlGaAs structures with δ-doped layer for microwave detection [J].
Suziedelis, Algirdas ;
Petkun, Valerij ;
Kozic, Antoni ;
Kazlauskaite, Viktorija ;
Cerskus, Aurimas ;
Steikunas, Gytis ;
Gradauskas, Jonas ;
Kundrotas, Jurgis ;
Asmontas, Steponas ;
Papsujeva, Irina ;
Narkunas, Aleksandras ;
Anbinderis, Tomas ;
Umansky, Vladimir ;
Shtrikmann, Hadas .
ADVANCED OPTICAL MATERIALS, TECHNOLOGIES, AND DEVICES, 2007, 6596
[9]   Intrinsic Limits of Electron Mobility in Modulation-Doped AlGaN/GaN 2D Electron Gas by Phonon Scattering [J].
Liang Pang .
Journal of Electronic Science and Technology, 2014, (04) :415-418
[10]   ELECTRON-MOBILITY AND DEEP LEVEL TRAP PROFILES OF MBE GAAS ON SI MESFETS [J].
GOOSTRAY, J ;
THOMAS, H ;
DUMAS, JM ;
HATZOPOLOS, Z ;
WARNER, D .
ELECTRONICS LETTERS, 1991, 27 (01) :84-85