NEW HIGH-TEMPERATURE STABLE POSITIVE PHOTORESISTS BASED ON HYDROXY POLYIMIDES AND POLYAMIDES CONTAINING THE HEXAFLUOROISOPROPYLIDENE (6-F) LINKING GROUP

被引：67

作者：

KHANNA, DN

MUELLER, WH

机构：

来源：

关键词：

D O I：

10.1002/pen.760291414

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：954 / 959

页数：6

共 11 条

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GOLDRICK, MR .

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[10]

MERREM HJ, 1986, POLYIMIDES SYNTHESIS, V2, P919