ELECTRON KINETICS OF WEAKLY IONIZED COLLISION-DOMINATED RF PLASMAS IN CO

被引：36
|
作者：
WINKLER, R
CAPITELLI, M
DILONARDO, M
GORSE, C
WILHELM, J
机构：
[1] UNIV BARI,CNR,CTR STUDIO CHIM PLASMI,I-70126 BARI,ITALY
[2] UNIV BARI,DEPARTIMENTO CHIM,I-70126 BARI,ITALY
来源：
PLASMA CHEMISTRY AND PLASMA PROCESSING | 1986年 / 6卷 / 04期
关键词：
D O I：
10.1007/BF00565555
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：437 / 456
页数：20
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