SURFACE CHARGE AND ANNEALING IN SI/SIO2 SYSTEM

被引:8
作者
BROTHERTON, SD
LAMB, DR
CLANCY, JW
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D O I
10.1080/00207217108938260
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页码:629 / +
页数:1
相关论文
共 3 条
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BROWN, DM ;
GRAY, PV .
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[2]   CHARACTERISTICS OF SURFACE-STATE CHARGE (QSS) OF THERMALLY OXIDIZED SILICON [J].
DEAL, BE ;
SKLAR, M ;
GROVE, AS ;
SNOW, EH .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (03) :266-+
[3]   EFFECT OF AMBIENT TEMPERATURE AND COOLING RATE ON SURFACE CHARGE AT SILICON/SILICON DIOXIDE INTERFACE [J].
LAMB, DR ;
BADCOCK, FR .
INTERNATIONAL JOURNAL OF ELECTRONICS, 1968, 24 (01) :11-&