APPLICATION OF PREFERENTIAL ELECTROCHEMICAL ETCHING OF SILICON TO SEMICONDUCTOR DEVICE TECHNOLOGY

被引：45
作者：
THEUNISSEN, MJ
APPELS, JA
VERKUYLEN, WH
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 07期
关键词：
D O I：
10.1149/1.2407698
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：959 / +
页数：1
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