PLASMA DIAGNOSTICS OF AN RF-SPUTTERING GLOW DISCHARGE

被引：163

作者：

COBURN, JW

KAY, E

机构：

来源：

APPLIED PHYSICS LETTERS | 1971年 / 18卷 / 10期

关键词：

D O I：

10.1063/1.1653483

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：435 / &

共 11 条

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