FABRICATION OF ONE-DIMENSIONAL GAAS WIRES BY FOCUSED ION-BEAM IMPLANTATION

被引：29

作者：

HIRAMOTO, T

HIRAKAWA, K

IKOMA, T

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 03期

关键词：

D O I：

10.1116/1.584338

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

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页码：1014 / 1017

页数：4

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