THEORETICAL CHARACTERISTICS OF SURFACE ELECTRIC-POTENTIAL SENSOR WITH VIBRATING SHUTTER AND ITS USE FOR MEASURING

被引:7
|
作者
TADA, Y
TOMIZAWA, Y
机构
[1] Department of Electrical Engineering, Gunma College of Technology, Gunma, 371
关键词
SURFACE ELECTRIC POTENTIAL SENSOR; SENSING ELECTRODE; VIBRATING SHUTTER; CONSTANT CURRENT CHARACTERISTIC; FIELD COMPENSATION METHOD; CALIBRATING METHOD; CORRECTING DISTANCE;
D O I
10.1143/JJAP.34.643
中图分类号
O59 [应用物理学];
学科分类号
摘要
A device termed the surface electric potential sensor is described. It is used for detecting the surface electric potential of a charged dielectric film and consists oi a vibrating shutter, a sensing electrode, and a preamplifier. The theoretical analysis shows that the sensor has a constant current characteristic, that its sensitivity becomes greater as its vibrating frequency becomes higher, and that the preamplifier has an input resistance which makes the sensitivity maximum. Although the calibrating method for measuring the electric potential using the sensor is not the standard one, it is now in use due to its low cost and the absence of electrical danger. Hence, the method has been compared with the compensation method known as the standard and most accurate one. It is found that more accurate measurement by the calibrating method can be performed using the concept of ''correcting distance''.
引用
收藏
页码:643 / 648
页数:6
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