DIAMOND-LIKE CARBON

被引：214
作者：
ROBERTSON, J
机构：
[1] Engineering Dept, Cambridge University
来源：
PURE AND APPLIED CHEMISTRY | 1994年 / 66卷 / 09期
关键词：
D O I：
10.1351/pac199466091789
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
Diamond-like carbon (DLC) is a dense, partially sp3 bonded form of amorphous carbon prepared by ion beam or plasma deposition and frequently used as a hard coating material. Its sp3 bonding arises from C+ ions penetrating surface layers and giving a quenched-in density increase. The formation of DLC can be viewed as a phase transition to a denser metastable phase. The atomic structure of DLC consists of a network of sp3 and sp2 sites. The pi states of sp2 sites control the electronic properties and the connectivity of sp3 sites controls the mechanical properties.
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页码：1789 / 1796
页数：8
相关论文
共 51 条
  • [1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON
    AISENBERG, S
    CHABOT, R
    [J]. JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) : 2953 - +
  • [2] DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS
    ANGUS, JC
    JANSEN, F
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03): : 1778 - 1782
  • [3] ANGUS JC, 1988, SCIENCE, V241, P877
  • [4] ELECTRONIC-PROPERTIES OF AMORPHOUS-CARBON FILMS
    BREDAS, JL
    STREET, GB
    [J]. JOURNAL OF PHYSICS C-SOLID STATE PHYSICS, 1985, 18 (21): : L651 - L655
  • [5] BURKE TM, 1993, J NONCRYST SOLIDS, V164, P1139
  • [6] CATHERINE Y, 1991, NATO ADV SCI I B-PHY, V266, P193
  • [7] CHEMICAL-STRUCTURE AND PHYSICAL-PROPERTIES OF DIAMOND-LIKE AMORPHOUS-CARBON FILMS PREPARED BY MAGNETRON SPUTTERING
    CHO, NH
    KRISHNAN, KM
    VEIRS, DK
    RUBIN, MD
    HOPPER, CB
    BHUSHAN, B
    BOGY, DB
    [J]. JOURNAL OF MATERIALS RESEARCH, 1990, 5 (11) : 2543 - 2554
  • [8] SPUTTER DEPOSITION OF DENSE DIAMOND-LIKE CARBON-FILMS AT LOW-TEMPERATURE
    CUOMO, JJ
    DOYLE, JP
    BRULEY, J
    LIU, JC
    [J]. APPLIED PHYSICS LETTERS, 1991, 58 (05) : 466 - 468
  • [9] A SIMPLE-MODEL FOR THE FORMATION OF COMPRESSIVE STRESS IN THIN-FILMS BY ION-BOMBARDMENT
    DAVIS, CA
    [J]. THIN SOLID FILMS, 1993, 226 (01) : 30 - 34
  • [10] BONDING IN HYDROGENATED HARD CARBON STUDIED BY OPTICAL SPECTROSCOPY
    DISCHLER, B
    BUBENZER, A
    KOIDL, P
    [J]. SOLID STATE COMMUNICATIONS, 1983, 48 (02) : 105 - 108
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