NOVEL METHOD FOR MEASURING EXCIMER LASER ABLATION THRESHOLDS OF POLYMERS

被引:39
作者
DYER, PE
JENKINS, SD
SIDHU, J
机构
关键词
D O I
10.1063/1.99612
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1880 / 1882
页数:3
相关论文
共 10 条
[1]   DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER [J].
ANDREW, JE ;
DYER, PE ;
FORSTER, D ;
KEY, PH .
APPLIED PHYSICS LETTERS, 1983, 43 (08) :717-719
[2]   DIRECT-ETCHING STUDIES OF POLYMER-FILMS USING A 157-NM F2 LASER [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS, 1986, 3 (05) :792-795
[3]   DEVELOPMENT AND ORIGIN OF CONICAL STRUCTURES ON XECL LASER ABLATED POLYIMIDE [J].
DYER, PE ;
JENKINS, SD ;
SIDHU, J .
APPLIED PHYSICS LETTERS, 1986, 49 (08) :453-455
[4]   EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS [J].
DYER, PE ;
SIDHU, J .
JOURNAL OF APPLIED PHYSICS, 1985, 57 (04) :1420-1422
[5]   SELF-DEVELOPING PHOTORESIST USING A VACUUM ULTRAVIOLET F2 EXCIMER LASER EXPOSURE [J].
HENDERSON, D ;
WHITE, JC ;
CRAIGHEAD, HG ;
ADESIDA, I .
APPLIED PHYSICS LETTERS, 1985, 46 (09) :900-902
[6]   CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES [J].
LAZARE, S ;
HOH, PD ;
BAKER, JM ;
SRINIVASAN, R .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1984, 106 (15) :4288-4290
[7]   SURFACE-PROPERTIES OF POLY(ETHYLENE-TEREPHTHALATE) FILMS MODIFIED BY FAR-ULTRAVIOLET RADIATION AT 193-NM (LASER) AND 185-NM (LOW INTENSITY) [J].
LAZARE, S ;
SRINIVASAN, R .
JOURNAL OF PHYSICAL CHEMISTRY, 1986, 90 (10) :2124-2131
[8]   DIRECT AND ACCURATE MEASUREMENT OF ETCH RATE OF POLYMER-FILMS UNDER FAR-UV IRRADIATION [J].
LAZARE, S ;
SOULIGNAC, JC ;
FRAGNAUD, P .
APPLIED PHYSICS LETTERS, 1987, 50 (10) :624-625
[9]   SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J].
SRINIVASAN, R ;
MAYNEBANTON, V .
APPLIED PHYSICS LETTERS, 1982, 41 (06) :576-578
[10]   ELECTROSTATIC COLLECTION OF DEBRIS RESULTING FROM 193 NM LASER ETCHING OF POLYIMIDE [J].
VONGUTFELD, RJ ;
SRINIVASAN, R .
APPLIED PHYSICS LETTERS, 1987, 51 (01) :15-17