SPUTTER-EROSION AND IMPURITY EMISSION FROM TITANIUM AND VANADIUM AT LOW-ENERGY ION-BOMBARDMENT

被引:59
作者
HOFER, WO
BAY, HL
MARTIN, PJ
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关键词
D O I
10.1016/0022-3115(78)90129-0
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:156 / 162
页数:7
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