EFFECT OF THE OXYGEN-PRESSURE DURING SPUTTERING ON THE PROPERTIES OF THIN CUOX FILMS

被引:33
作者
BEENSHMARCHWICKA, G
KROLSTEPNIEWSKA, L
SLABY, M
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关键词
D O I
10.1016/0040-6090(82)90347-9
中图分类号
T [工业技术];
学科分类号
08 ;
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页码:33 / 39
页数:7
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