MAGNESIUM-DOPING AND CALCIUM-DOPING BEHAVIOR IN MOLECULAR-BEAM EPITAXIAL-III-V COMPOUNDS

被引:134
作者
WOOD, CEC [1 ]
DESIMONE, D [1 ]
SINGER, K [1 ]
WICKS, GW [1 ]
机构
[1] CORNELL UNIV,NATL RES & RESOURCE FACIL SUBMICRON STRUCT,ITHACA,NY 14853
关键词
D O I
10.1063/1.331248
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:4230 / 4235
页数:6
相关论文
共 16 条
[1]   MAGNESIUM-DOPED GAAS AND ALXGA1-XAS BY MOLECULAR-BEAM EPITAXY [J].
CHO, AY ;
PANISH, MB .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (12) :5118-5123
[2]  
DESIMONE D, UNPUB
[3]  
HONIG RE, 1969, RCA REV, V30, P2
[4]  
Ilegems M., 1975, J APPL PHYS, V46, P3059
[5]  
ILEGEMS M, 1977, J APPL PHYS, V48, P1279
[6]   GROWTH AND DOPING KINETICS IN MOLECULAR-BEAM EPITAXY [J].
JOYCE, BA ;
FOXON, CT .
JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 :17-23
[7]   VOLATILE METAL-OXIDE INCORPORATION IN LAYERS OF GAAS AND GA1-XALXAS GROWN BY MOLECULAR-BEAM EPITAXY [J].
KIRCHNER, PD ;
WOODALL, JM ;
FREEOUF, JL ;
WOLFORD, DJ ;
PETTIT, GD .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (03) :604-606
[8]  
MALIK RJ, 1981, 3RD INT MOL BEAM EP
[9]  
NAGANUMA M, 1975, APPL PHYS LETT, V27, P3413
[10]   STRONGLY QUENCHED DEFORMATION POTENTIALS OF MN ACCEPTOR IN GAAS [J].
SCHAIRER, W ;
SCHMIDT, M .
PHYSICAL REVIEW B, 1974, 10 (06) :2501-2506