MONTE-CARLO SIMULATION OF REGISTRATION SIGNALS FOR ELECTRON-BEAM MICROFABRICATION

被引：7
|
作者：
LIN, YC
ADESIDA, I
NEUREUTHER, AR
机构：
来源：
APPLIED PHYSICS LETTERS | 1980年 / 36卷 / 08期
关键词：
D O I：
10.1063/1.91604
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：672 / 674
页数：3
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