POLYMERIC CYANOBORANE, (CNBH2)N - SINGLE SOURCE FOR CHEMICAL VAPOR-DEPOSITION OF BORON-NITRIDE FILMS

被引：23
|
作者：
MAYA, L [1 ]
RICHARDS, HL [1 ]
机构：
[1] OAK RIDGE NATL LAB,DEV SECT,Y-12 PLANT,OAK RIDGE,TN 37831
来源：
JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1991年 / 74卷 / 02期
关键词：
CHEMICAL VAPOR DEPOSITION; FILMS; BORANES; POLYMERS; AMMONIA;
D O I：
10.1111/j.1151-2916.1991.tb06895.x
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Polymeric cyanoborane, (CNBH2)n, is a material readily prepared by passing hydrogen chloride through an ether suspension of sodium cyanotrihydroborate. This polymeric material was volatilized in a CVD reactor to produce, at 600-degrees-C, amorphous films containing boron, nitrogen, and carbon. Residual carbon present in the films was removed by ammonia treatment at 800-degrees-C, producing nearly stoichiometric boron nitride films that were adherent to a variety of substrates including silicon.
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页码：406 / 409
页数：4
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