OPTICALLY TRANSPARENT INDIUM-TIN-OXIDE (ITO) OHMIC CONTACTS IN THE FABRICATION OF VERTICAL-CAVITY SURFACE-EMITTING LASERS

被引：25
作者：
MATIN, MA
JEZIERSKI, AF
BASHAR, SA
LACKLISON, DE
BENSON, TM
CHENG, TS
ROBERTS, JS
SALE, TE
ORTON, JW
FOXON, CT
REZAZADEH, AA
机构：
[1] UNIV LONDON KINGS COLL,DEPT ELECTR & ELECT ENGN,LONDON WC2R 2LS,ENGLAND
[2] UNIV SHEFFIELD,DEPT ELECTR & ELECT ENGN,SHEFFIELD S1 4DU,ENGLAND
来源：
ELECTRONICS LETTERS | 1994年 / 30卷 / 04期
关键词：
OHMIC CONTACTS; LASERS;
D O I：
10.1049/el:19940243
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The authors report what they believe to be the first successful fabrication of an InGaAs/GaAs vertical-cavity surface emitting laser (VCSEL) using optically transparent indium-tin-oxide (ITO) ohmic contacts to p- and n-type regions of the laser. Threshold current densities J(th) are similar to those lasers fabricated from the same wafer using conventional ohmic contacts.
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收藏
页码：318 / 320
页数：3
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