THEORETICAL-STUDIES ON THE CORE STRUCTURE OF THE 450-DEGREES-C OXYGEN THERMAL DONORS IN SILICON

被引:102
作者
DEAK, P
SNYDER, LC
CORBETT, JW
机构
[1] SUNY ALBANY, DEPT CHEM, ALBANY, NY 12222 USA
[2] SUNY ALBANY, DEPT PHYS, ALBANY, NY 12222 USA
[3] TECH UNIV BUDAPEST, INST PHYS, H-1111 BUDAPEST, HUNGARY
关键词
D O I
10.1103/PhysRevB.45.11612
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Results of molecular- and cyclic-cluster calculations using semiempirical Hamiltonians on a wide range of small oxygen complexes in crystalline silicon are reported. It is shown that a core involving (at most) two oxygens and a self-interstitial can explain the observed behavior of the thermal-double-donor complexes arising in silicon after heat treatment around 450-degrees-C, while all other oxygen complexes proposed so far can be excluded as the core of these centers.
引用
收藏
页码:11612 / 11626
页数:15
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