THE DETERMINATION OF THE FLUX-DENSITY OF SPUTTERED ATOMS BY MEANS OF PULSED DYE-LASER EXCITED FLUORESCENCE

被引:49
作者
HINTZ, E [1 ]
RUSBULDT, D [1 ]
SCHWEER, B [1 ]
BOHDANSKY, J [1 ]
ROTH, J [1 ]
MARTINELLI, AP [1 ]
机构
[1] MAX PLANCK INST PLASMA PHYS, D-8046 GARCHING, FED REP GER
关键词
D O I
10.1016/0022-3115(80)90188-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:656 / 663
页数:8
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