CHOICE OF COMPENSATOR AZIMUTH AND POSITION IN ELLIPSOMETRY

被引：14

作者：

AZZAM, RMA

BASHARA, NM

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1972年 / 62卷 / 05期

关键词：

D O I：

10.1364/JOSA.62.000700

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

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页码：700 / &

相关论文

共 6 条

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ARCHER RJ, 1968, MANUAL ELLIPSOMETRY, P4

[2] MEASUREMENT AND CORRECTION OF FIRST-ORDER ERRORS IN ELLIPSOMETRY [J].

ASPNES, DE .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (08) :1077-&

[3] UNIFIED ANALYSIS OF ELLIPSOMETRY ERRORS DUE TO IMPERFECT COMPONENTS, CELL-WINDOW BIREFRINGENCE, AND INCORRECT AZIMUTH ANGLES [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (05) :600-&

[4] SPECIMEN COHERENT SCATTERING AND COMPENSATOR DEFECTS IN ELLIPSOMETRY [J].

AZZAM, RMA ;

BASHARA, NM .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (09) :1236-&

[5] PRECISION OF ELLIPSOMETRIC MEASUREMENT [J].

SCHMIDT, E .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1970, 60 (04) :490-&

[6]

1971, J OPT SOC, V61, P1380