SURFACE PROFILING WITH SCANNING OPTICAL MICROSCOPES USING 2-MODE OPTICAL FIBERS

被引：12

作者：

JUSKAITIS, R

WILSON, T

机构：

[1] Department of Engineering Science, University of Oxford, Oxford, OX1 3PJ, Parks Road

[2] Laser Research Center, Vilnius University, Vilnius

来源：

APPLIED OPTICS | 1992年 / 31卷 / 22期

关键词：

D O I：

10.1364/AO.31.004569

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A scanning optical microscope system is proposed that uses a slightly laterally offset optical fiber. The fiber is capable of supporting two modes, and it is shown that by detecting the interference between these modes the response to surface height is linear in the focal region. This linearity permits noncontacting surface profilometry to be readily obtained for specimens of uniform reflectivity. For other specimens, a simple feedback system is introduced to obtain surface profiles as well as intensity-coded height images.

引用

页码：4569 / 4574

页数：6

共 11 条

[1]

[Anonymous], [No title captured], Patent No. [3013467 A, 3013467]

[2] INTEGRATED-CIRCUIT METROLOGY WITH CONFOCAL OPTICAL MICROSCOPY [J].

BENNETT, SD ;

LINDOW, JT ;

SMITH, IR .

PHILOSOPHICAL TRANSACTIONS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 1986, 320 (1554) :307-313

[3] DISTANCE MEASUREMENTS BY DIFFERENTIAL CONFOCAL OPTICAL RANGING [J].

CORLE, TR ;

FANTON, JT ;

KINO, GS .

APPLIED OPTICS, 1987, 26 (12) :2416-2420

[4]

GINIUNAS L, 1991, ELECTRON LETT, V27, P724, DOI 10.1049/el:19910450

[5] 3-DIMENSIONAL SURFACE MEASUREMENT USING THE CONFOCAL SCANNING MICROSCOPE [J].

HAMILTON, DK ;

WILSON, T .

APPLIED PHYSICS B-PHOTOPHYSICS AND LASER CHEMISTRY, 1982, 27 (04) :211-213

[6] SURFACE PROFILE MEASUREMENT USING THE CONFOCAL MICROSCOPE [J].

HAMILTON, DK ;

WILSON, T .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (07) :5320-5322

[7]

JUSKAITIS R, IN PRESS APPL OPT

[8] CONFOCAL SCANNING OPTICAL MICROSCOPE USING SINGLE-MODE FIBER FOR SIGNAL-DETECTION [J].

KIMURA, S ;

WILSON, T .

APPLIED OPTICS, 1991, 30 (16) :2143-2150

[9] IMAGES OF PHASE EDGES IN CONVENTIONAL AND SCANNING OPTICAL MICROSCOPES [J].

WILSON, T .

APPLIED OPTICS, 1981, 20 (18) :3238-3244

[10]

Wilson T., 1990, CONFOCAL MICROSCOPY

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