AUTOMATIC OPTICAL THICKNESS GAUGE FOR THIN FILM MEASUREMENTS

被引：5
|
作者：
MURRAY, TP
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1962年 / 33卷 / 02期
关键词：
D O I：
10.1063/1.1746529
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
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页码：172 / &
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