IN-SITU RHEED STUDIES OF YBCO-FILM GROWTH DURING PULSED LASER DEPOSITION

被引:4
作者
Karl, H. [1 ]
Stritzker, B. [1 ]
机构
[1] Univ Augsburg, Inst Phys, D-8900 Augsburg, Germany
关键词
D O I
10.1109/77.233897
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In-situ Reflection high-energy electron diffraction (RHEED) measurements during laser ablation of YBa2Cu3O7-x (YBCO) on SrTiO3(100), (305) and on SrTiO3(100) misoriented 2 degrees and 3 degrees towards (110) were performed. The specularly reflected electron intensity oscillation is modulated by the laser pulse deposition frequency. The crystallization of the deposited material is directly monitored by an exponential intensity rise of the specular intensity. From the time constant the critical laser repetition frequency can be estimated. Oscillations were not observed during the growth on 3 degrees vicinal SrTiO3(100) and on SrTiO3(305) substrates. For these substrates well-alligned steps parallel to the [100] direction exist due to growth by step movement. From this a mean diffusion length between 7.5 nm and 11 nm at 720 degrees C was determined.
引用
收藏
页码:1594 / 1597
页数:4
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