SILICON HOMOEPITAXIAL THIN-FILMS VIA SILANE PYROLYSIS - HEED AND AUGER-ELECTRON SPECTROSCOPY STUDY

被引：80
作者：
HENDERSON, RC
HELM, RF
机构：
来源：
SURFACE SCIENCE | 1972年 / 30卷 / 02期
关键词：
D O I：
10.1016/0039-6028(72)90005-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：310 / +
页数：1
相关论文
共 50 条
[41]   X-RAY PHOTOELECTRON-SPECTROSCOPY AND AUGER ELECTRON-SPECTROSCOPY OF POLYCRYSTALLINE SILICON THIN-FILMS [J].
CARRIERE, B ;
DEVILLE, JP ;
BURGGRAF, C .
ANALUSIS, 1981, 9 (05) :236-239
[42]   A STUDY OF CHEMICAL BONDING IN SUBOXIDES OF SILICON USING AUGER-ELECTRON SPECTROSCOPY [J].
CHAO, SS ;
TYLER, JE ;
TAKAGI, Y ;
PAI, PG ;
LUCOVSKY, G ;
LIN, SY ;
WONG, CK ;
MANTINI, MJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :1574-1579
[43]   STUDY OF THE DEPTH PROFILE OF PHOSPHORUS DIFFUSION IN SILICON BY AUGER-ELECTRON SPECTROSCOPY [J].
KOSTISHKO, BM ;
ORLOV, AM ;
LEVKINA, TG .
INORGANIC MATERIALS, 1994, 30 (06) :794-795
[44]   TOWARDS A QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY OF THE SILICON OXYNITRIDES [J].
BLANC, E ;
SEGAUD, JP ;
LAUROZ, C .
APPLIED SURFACE SCIENCE, 1989, 37 (01) :1-15
[45]   AUGER-ELECTRON SPECTROSCOPY AND SECONDARY-ION MASS-SPECTROSCOPY STUDY OF INTERDIFFUSION IN GOLD BISMUTH OXIDE AND ALUMINUM BISMUTH OXIDE THIN-FILMS [J].
SUNDARAM, KB ;
GROGAN, AL ;
SESHAN, SS .
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 1992, 3 (04) :257-262
[46]   CONVOLUTION AND DECONVOLUTION IN AUGER-ELECTRON SPECTROSCOPY, WITH APPLICATION TO SILICON [J].
ONSGAARD, JH ;
MORGEN, P ;
CREASER, RP .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (01) :44-49
[47]   AUGER-ELECTRON SPECTROSCOPY OF INSULATING SILICON-COMPOUNDS [J].
CARRIERE, B ;
DEVILLE, JP ;
GOLDSZTAUB, S .
VACUUM, 1972, 22 (10) :485-487
[48]   AUGER-ELECTRON SPECTROSCOPY OF A HYDROGENATED AMORPHOUS-SILICON [J].
LAZNICKA, M .
CZECHOSLOVAK JOURNAL OF PHYSICS, 1980, 30 (06) :646-651
[49]   QUANTITATIVE AUGER-ELECTRON SPECTROSCOPY OF SUPERCONDUCTING Y-BA-CU-O SINGLE-CRYSTALS AND THIN-FILMS [J].
SEIBT, EW ;
ZALAR, A .
MATERIALS LETTERS, 1991, 11 (1-2) :1-5
[50]   CHARACTERIZATION OF EPITAXIAL THIN-FILMS BY REFLECTION HIGH-ENERGY ELECTRON-DIFFRACTION, TRANSMISSION ELECTRON-MICROSCOPY AND AUGER-ELECTRON SPECTROSCOPY [J].
VOOK, RW .
THIN SOLID FILMS, 1982, 90 (01) :99-99
12345