QUALITY IMPROVEMENT IN A-SI FILMS AND THEIR APPLICATION TO A-SI SOLAR-CELLS

Much attention has recently been paid to the application of a-Si as a material for use in low-cost solar cells. However, such use will require further improvements in conversion efficiency. Accordingly, detailed theoretical studies have been made on energy conversion processes, and experiments are being conducted on the super chamber method, a photo-CVD method, superlattice structures, and a new p-type doping gas, B (CH3)3. The results of these experiments have led to a total area efficiency of 9.60 percent for a 100-cm2 cell. This level is the highest ever achieved. © 1990 IEEE