THE MEASUREMENT OF THIN FILM THICKNESS BY INTERFEROMETRY

被引:9
|
作者
TOLANSKY, S
机构
关键词
D O I
10.1364/JOSA.41.000425
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:425 / 426
页数:2
相关论文
共 50 条
  • [1] Thin film thickness measurement by double laser interferometry
    Domingo, M.
    Millan, C.
    Satorre, M. A.
    Canto, J.
    OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION V, PTS 1 AND 2, 2007, 6616 : A6164 - A6164
  • [2] Thin film thickness measurement based on laser heterodyne interferometry
    Shi Kai
    Su Junhong
    9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES (AOMATT 2018): OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT, 2019, 10839
  • [3] Application of Optical Spectral Interferometry for Thin Film Thickness Measurement
    Lukin, Konstantin A.
    Tatyanko, Dmytro N.
    Pikh, Alona B.
    2016 9TH INTERNATIONAL KHARKIV SYMPOSIUM ON PHYSICS AND ENGINEERING OF MICROWAVES, MILLIMETER AND SUBMILLIMETER WAVES (MSMW), 2016,
  • [4] Measurement of thin film thickness by electronic speckle pattern interferometry
    Karaalioglu, C
    Skarlatos, Y
    OPTICS COMMUNICATIONS, 2004, 234 (1-6) : 269 - 276
  • [5] Measurement of thin liquid film thickness in pipes based on optical interferometry
    Ting Xue
    Yan Wu
    Optoelectronics Letters, 2022, 18 : 489 - 494
  • [6] Measurement of thin liquid film thickness in pipes based on optical interferometry
    Xue, Ting
    Wu, Yan
    OPTOELECTRONICS LETTERS, 2022, 18 (08) : 489 - 494
  • [7] Thin Film Thickness and Refractive Index Measurement by Multiple Beam Interferometry
    Chen, T. Y.
    Lin, Y. J.
    Hu, S. G.
    Yang, S. L.
    Chung, J. C.
    FOURTH INTERNATIONAL CONFERENCE ON EXPERIMENTAL MECHANICS, 2010, 7522
  • [8] Measurement of thin liquid film thickness in pipes based on optical interferometry
    XUE Ting
    WU Yan
    Optoelectronics Letters, 2022, 18 (08) : 489 - 494
  • [9] White light scanning interferometry for thickness measurement of thin film layers
    Kim, GH
    Kim, SW
    OPTICAL DIAGNOSTICS FOR FLUIDS/HEAT/COMBUSTION AND PHOTOMECHANICS FOR SOLIDS, 1999, 3783 : 239 - 246
  • [10] Fourier transform method for measurement of thin film thickness by speckle interferometry
    Karaalioglu, C
    Skarlatos, Y
    OPTICAL ENGINEERING, 2003, 42 (06) : 1694 - 1698