METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY

被引：212
作者：
BOZACK, MJ
MUEHLHOFF, L
RUSSELL, JN
CHOYKE, WJ
YATES, JT
机构：
[1] UNIV PITTSBURGH,DEPT PHYS,PITTSBURGH,PA 15260
[2] WESTINGHOUSE ELECT CORP,CTR RES & DEV,PITTSBURGH,PA 15235
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期
关键词：
D O I：
10.1116/1.574131
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：1 / 8
页数：8
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