METHODS IN SEMICONDUCTOR SURFACE-CHEMISTRY

被引：212

作者：

BOZACK, MJ

MUEHLHOFF, L

RUSSELL, JN

CHOYKE, WJ

YATES, JT

机构：

[1] UNIV PITTSBURGH,DEPT PHYS,PITTSBURGH,PA 15260

[2] WESTINGHOUSE ELECT CORP,CTR RES & DEV,PITTSBURGH,PA 15235

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.574131

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1 / 8

页数：8

共 22 条

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