USE OF AN ULTRAHIGH-VACUUM BALANCE FOR THE QUANTITATIVE ASSAY OF EVAPORATED REFERENCE LAYERS

被引：9

作者：

ESCHBACH, HL

MITCHELL, IV

LOUWERIX, E

机构：

来源：

关键词：

D O I：

10.1016/0040-6031(81)87048-7

中图分类号：

O414.1 [热力学];

学科分类号：

摘要：

引用

页码：33 / 43

页数：11

共 15 条

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[2]

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[3]

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NUCLEAR INSTRUMENTS & METHODS, 1972, 102 (03) :469-&

[5]

ESCHBACH HL, 1965, VACUUM MICROBALANCE, V5, P207

[6]

ESCHBACH HL, 1969, VIDE, P97

[7]

Maissel L.I., 1970, HDB THIN FILM TECHNO

[8] STANDARDS FOR BACKSCATTERING ANALYSIS [J].

MITCHELL, IV ;

ESCHBACH, HL .

NUCLEAR INSTRUMENTS & METHODS, 1978, 149 (1-3) :727-733

[9]

MORET H, 1970, VACUUM MICROBALANCE, V7, P173

[10]

MORET H, 1965, VAC MICROBALANCE TEC, V5, P59