SOL-GEL-DERIVED TIN OXIDE THIN-FILMS

被引：93
|
作者：
PARK, SS
MACKENZIE, JD
机构：
[1] Department of Materials Science and Engineering, University of California-Los Angeles, Los Angeles
来源：
THIN SOLID FILMS | 1995年 / 258卷 / 1-2期
关键词：
ELECTRICAL PROPERTIES AND MEASUREMENTS; ELECTRON MICROSCOPY; OPTICAL PROPERTIES; TIN OXIDE;
D O I：
10.1016/0040-6090(94)06404-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Transparent conducting thin films of SnO2-x have been prepared from tin alkoxide by dip coating. The influence of the dip coating parameters such as solution concentration, the withdrawal speed of substrates from solution, firing temperature, and the number of coating applications on the thickness, electrical and optical properties of the films was investigated. The study demonstrates that the films with thickness of 0.8-1.1 mu m have sheet resistances as low as 52-85 Omega rectangle(-1) (or a resistivity of about 6 x 10(-3) Omega cm) and average visible transmittance of 84-89% in the wavelength range 0.4-0.7 mu m. The morphology, surface structure and composition of the films were investigated by scanning electron microscopy, transmission electron microscopy, X-ray diffraction, and Auger electron spectroscopy.
引用
收藏
页码：268 / 273
页数：6
相关论文
共 50 条
  • [31] Synthesis of Nanostructured Tin Oxide (SnO2) Powders and Thin Films by Sol-Gel Method
    Bhagwat, Ashok D.
    Sawant, Sachin S.
    Ankamwar, Balaprasad G.
    Mahajan, Chandrashekhar M.
    JOURNAL OF NANO- AND ELECTRONIC PHYSICS, 2015, 7 (04)
  • [32] Opto-Electrical Study of Sol-Gel Derived Antimony Doped Tin Oxide Films on Glass
    De, Arijit
    TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS, 2015, 16 (01) : 5 - 9
  • [33] CHARACTERIZATION OF POROUS TIN OXIDE THIN-FILMS AND THEIR APPLICATION TO MICROSENSOR FABRICATION
    CHUNG, WY
    KIM, TH
    HONG, YH
    LEE, DD
    SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) : 482 - 485
  • [34] XRD AND SEM STUDIES OF REACTIVELY DEPOSITED TIN OXIDE THIN-FILMS
    ABRAHAM, JT
    KOSHY, P
    VAIDYAN, VK
    MUKHERJEE, PS
    GURUSWAMY, P
    KUMARI, LP
    BULLETIN OF MATERIALS SCIENCE, 1995, 18 (05) : 557 - 562
  • [35] Investigation and control of microcracks in tin oxide gas sensing thin-films
    Tang, ZN
    Chan, PCH
    Sharma, RK
    Yan, GZ
    Hsing, IM
    Sin, JKO
    SENSORS AND ACTUATORS B-CHEMICAL, 2001, 79 (01) : 39 - 47
  • [36] Synthesis and characterization of sol-gel derived gallium-doped zinc oxide thin films
    Tsay, Chien-Yie
    Fan, Kai-Shiung
    Lei, Chien-Ming
    JOURNAL OF ALLOYS AND COMPOUNDS, 2012, 512 (01) : 216 - 222
  • [37] Improving electrical properties of sol-gel derived zinc oxide thin films by plasma treatment
    Talukder, Al-Ahsan
    Pokharel, Jyotshna
    Shrestha, Maheshwar
    Fan, Qi H.
    JOURNAL OF APPLIED PHYSICS, 2016, 120 (15)
  • [38] Synthesis of ZnO sol-gel thin-films CMOS-Compatible
    Ben Moussa, Nizar
    Lajnef, Mohamed
    Jebari, Nessrine
    Villebasse, Cedric
    Bayle, Fabien
    Chaste, Julien
    Madouri, Ali
    Chtourou, Radouane
    Herth, Etienne
    RSC ADVANCES, 2021, 11 (37) : 22723 - 22733
  • [39] Sol-Gel Deposited Sb-Doped Tin Oxide Films
    M. Guglielmi
    E. Menegazzo
    M. Paolizzi
    G. Gasparro
    D. Ganz
    J. Pütz
    M.A. Aegerter
    L. Hubert-Pfalzgraf
    C. Pascual
    A. Durán
    H.X. Willems
    M. Van Bommel
    L. Büttgenbach
    L. Costa
    Journal of Sol-Gel Science and Technology, 1998, 13 : 679 - 683
  • [40] Sol-gel derived Al-doped zinc oxide - Reduced graphene oxide nanocomposite thin films
    Yu, Xiayang
    Xu, Jian
    Lu, Huanming
    Fang, Gang
    JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 699 : 79 - 86
12345