INVESTIGATION OF THE HYDROGEN AND IMPURITY CONTENTS OF AMORPHOUS-SILICON BY SECONDARY ION MASS-SPECTROMETRY

被引：19
作者：
MAGEE, C
CARLSON, DE
机构：
来源：
SOLAR CELLS | 1980年 / 2卷 / 04期
关键词：
D O I：
10.1016/0379-6787(80)90012-5
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
引用
收藏
页码：365 / 376
页数：12
相关论文
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[6]   SECONDARY ION QUADRUPOLE MASS-SPECTROMETER FOR DEPTH PROFILING-DESIGN AND PERFORMANCE EVALUATION [J].
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[7]   DEPTH PROFILING OF N-TYPE DOPANTS IN SI AND GAAS USING CS+ BOMBARDMENT NEGATIVE SECONDARY ION MASS-SPECTROMETRY IN ULTRAHIGH-VACUUM [J].
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[8]  
MAGEE CW, 1979, ANAL HYDROGEN SOLIDS, P43
[9]  
MAGEE CW, 1978, P TOPICAL C CHARACTE, P151
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