APPROXIMATION OF ION-IMPLANTATION DISTRIBUTION BY PEARSON FUNCTIONS

被引：0
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作者：
ABDRASHITOV, VG
RYZHOV, VV
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来源：
IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1992年 / 56卷 / 06期
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O4 [物理学];
学科分类号：
0702 ;
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页码：6 / 11
页数：6
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