APPROXIMATION OF ION-IMPLANTATION DISTRIBUTION BY PEARSON FUNCTIONS

被引：0

作者：

ABDRASHITOV, VG

RYZHOV, VV

机构：

来源：

IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA | 1992年 / 56卷 / 06期

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暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：6 / 11

页数：6

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