THEORY OF THE SPUTTERING PROCESS

被引：53
作者：
HARRISON, DE
机构：
来源：
PHYSICAL REVIEW | 1956年 / 102卷 / 06期
关键词：
D O I：
10.1103/PhysRev.102.1473
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
引用
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页码：1473 / 1480
页数：8
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