THEORY OF THE SPUTTERING PROCESS

被引:53
作者
HARRISON, DE
机构
来源
PHYSICAL REVIEW | 1956年 / 102卷 / 06期
关键词
D O I
10.1103/PhysRev.102.1473
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
引用
收藏
页码:1473 / 1480
页数:8
相关论文
共 13 条
[1]   About the Sputtering at oblique Collision of the Ions [J].
Fetz, H. .
ZEITSCHRIFT FUR PHYSIK, 1942, 119 (9-10) :590-601
[2]  
GLOCKLER G, 1939, ELECTROCHEMISTRY GAS, pCH19
[3]  
Grove W.R., 1852, PHILOS T R SOC, V142, P87, DOI DOI 10.1098/RSTL.1852.0008
[4]   A MECHANISM FOR SPUTTERING IN THE HIGH VACUUM BASED UPON THE THEORY OF NEUTRON COOLING [J].
KEYWELL, F .
PHYSICAL REVIEW, 1952, 87 (01) :160-161
[5]   MEASUREMENTS AND COLLISION - RADIATION DAMAGE THEORY OF HIGH-VACUUM SPUTTERING [J].
KEYWELL, F .
PHYSICAL REVIEW, 1955, 97 (06) :1611-1619
[6]   The removal of thorium from the surface of a thoriated tungsten filament by positive ion bombardment [J].
Kingdon, KH ;
Langmuir, I .
PHYSICAL REVIEW, 1923, 22 (02) :148-160
[7]   THEORY OF THE SLOWING DOWN OF NEUTRONS BY ELASTIC COLLISION WITH ATOMIC NUCLEI [J].
MARSHAK, RE .
REVIEWS OF MODERN PHYSICS, 1947, 19 (03) :185-238
[8]  
MASSEY HSW, 1952, ELECTRON IONIC IMP, P578
[9]   ON THE THEORY OF THE SLOWING DOWN OF NEUTRONS IN HEAVY SUBSTANCES [J].
PLACZEK, G .
PHYSICAL REVIEW, 1946, 69 (9-10) :423-438
[10]  
Thomson W. T., 1950, LAPLACE TRANSFORMATI