NEW EVIDENCE FOR A PRESSURE-INDUCED PHASE-TRANSFORMATION DURING THE INDENTATION OF SILICON

被引：197

作者：

PHARR, GM ^{[1
]}

OLIVER, WC ^{[1
]}

HARDING, DS ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831

来源：

JOURNAL OF MATERIALS RESEARCH | 1991年 / 6卷 / 06期

基金：

美国能源部;

关键词：

D O I：

10.1557/JMR.1991.1129

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Scanning electron micrographs of indents in (111) silicon reveal that a thin layer of material immediately adjacent to the indenter is plastically extruded. The fact that the material can be deformed in this way indicates that it has metallic-like mechanical properties. This is presented as new evidence that a pressure-induced phase transformation to the metallic state occurs during the indentation of silicon.

引用

页码：1129 / 1130

页数：2

共 8 条

[1]

CLARKE DR, 1988, PHYS REV LETT, V21, P2156

[2] MICROHARDNESS OF CARBON-DOPED (111) P-TYPE CZOCHRALSKI SILICON [J].