LINE RESOLUTION IN THE SUB-10-NANOMETER RANGE IN SAM

被引：18

作者：

CAZAUX, J ^{[1
]}

CHAZELAS, J ^{[1
]}

CHARASSE, MN ^{[1
]}

HIRTZ, JP ^{[1
]}

机构：

[1] THOMSON CSF,CENT RECH LAB,F-91401 ORSAY,FRANCE

来源：

ULTRAMICROSCOPY | 1988年 / 25卷 / 01期

关键词：

D O I：

10.1016/0304-3991(88)90403-2

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

引用

页码：31 / 34

页数：4

共 10 条

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