CONTINUOUS AMORPHOUS ANTIMONY THIN-FILMS OBTAINED BY LOW-ENERGY CLUSTER BEAM DEPOSITION

被引：21
|
作者：
JENSEN, P
MELINON, P
TREILLEUX, M
HOAREAU, A
HU, JX
CABAUD, B
机构：
[1] Département de Physique des Matériaux, Université Claude Bernard Lyon-1, F-69622 Villeurbanne Cedex, 43
来源：
APPLIED PHYSICS LETTERS | 1991年 / 59卷 / 12期
关键词：
D O I：
10.1063/1.105326
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have prepared continuous amorphous antimony thin films by low-energy cluster beam deposition. Contrary to the antimony films prepared by molecular beam deposition, this new technique allows preparation of continuous amorphous films which are stable at room temperature. This study has been carried out by combining electrical measurements and transmission electron microscopy observations.
引用
收藏
页码：1421 / 1423
页数：3
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