AN ECR-RFQ ION-BEAM FACILITY FOR MATERIALS RESEARCH WITH HIGHLY CHARGED SLOW IONS

被引：5
|
作者：
HOFMANN, D
BAUMANN, H
FREUDENBERGER, C
HERRMANN, R
SCHEMPP, A
SCHMIDTBOCKING, H
ZSCHORNACK, G
BETHGE, K
KLEIN, H
LYNEIS, C
STOCK, R
机构：
[1] UNIV CALIF BERKELEY LAWRENCE BERKELEY LAB,BERKELEY,CA 94720
[2] TECH UNIV DRESDEN,SEKT PHYS,O-8027 DRESDEN,GERMANY
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1990年 / 50卷 / 1-4期
关键词：
D O I：
10.1016/0168-583X(90)90404-I
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An ion beam facility is described which can produce intense beams of very highly charged ions with variable energy in the keV and MeV regime. This facility consists of an electron cyclotron resonance ion source (ECR) and a radiofrequency quadrupole accelerating structure (RFQ). It provides a relatively cheap and compact device for material research with highly charged ions at surfaces as well as for deep-lying solid layers. © 1990.
引用
收藏
页码：478 / 480
页数：3
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