ENERGY-SPECTRA OF SECONDARY IONS AND SECONDARY ION EMISSION (SIE) MECHANISMS

被引：20
|
作者：
TSIPINYUK, BA
VEKSLER, VI
机构：
来源：
VACUUM | 1979年 / 29卷 / 4-5期
关键词：
D O I：
10.1016/S0042-207X(79)80747-2
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：155 / 167
页数：13
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