WAVEFORM MEASUREMENTS ON GIGAHERTZ SEMICONDUCTOR-DEVICES BY SCANNING ELECTRON-MICROSCOPE STROBOSCOPY

被引:10
作者
FUJIOKA, H
URA, K
机构
关键词
D O I
10.1063/1.92524
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:81 / 82
页数:2
相关论文
共 9 条
[1]   QUANTITATIVE MEASUREMENT WITH HIGH TIME RESOLUTION OF INTERNAL WAVEFORMS ON MOS RAMS USING A MODIFIED SCANNING ELECTRON-MICROSCOPE [J].
FEUERBAUM, HP ;
KANTZ, D ;
WOLFGANG, E ;
KUBALEK, E .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1978, 13 (03) :319-325
[2]   FUNCTION TESTING OF BIPOLAR ICS AND LSIS WITH THE STROBOSCOPIC SCANNING ELECTRON-MICROSCOPE [J].
FUJIOKA, H ;
NAKAMAE, K ;
URA, K .
IEEE JOURNAL OF SOLID-STATE CIRCUITS, 1980, 15 (02) :177-183
[3]   TECHNIQUE FOR STUDY OF GUNN DEVICES AT 9.1 GHZ USING A SCANNING ELECTRON-MICROSCOPE [J].
GOPINATH, A ;
HILL, MS .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1973, ED20 (07) :610-612
[4]   HIGH-RESOLUTION SAMPLING SEM FOR QUANTITATIVE INVESTIGATIONS OF SEMICONDUCTOR-DEVICES AND INTEGRATED-CIRCUITS [J].
GOPINATH, A ;
GOPINATHAN, KG .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (04) :431-434
[5]   GIGAHERTZ STROBOSCOPY WITH SCANNING ELECTRON-MICROSCOPE [J].
HOSOKAWA, T ;
FUJIOKA, H ;
URA, K .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1978, 49 (09) :1293-1299
[6]   2-DIMENSIONAL OBSERVATION OF GUNN DOMAINS AT 1 GHZ BY PICOSECOND PULSE STROBOSCOPIC SEM [J].
HOSOKAWA, T ;
FUJIOKA, H ;
URA, K .
APPLIED PHYSICS LETTERS, 1977, 31 (05) :340-340
[7]   ANALYSIS OF THE HIGH-FIELD DOMAIN DYNAMICS IN A PLANAR GUNN DIODE BY USING A STROBOSCOPIC SEM [J].
MASUDA, M ;
OGURA, T ;
KOYAMA, J ;
FUJIOKA, H ;
HOSOKAWA, T ;
URA, K .
JOURNAL OF APPLIED PHYSICS, 1979, 50 (01) :530-536
[8]   STUDY OF 2-DIMENSIONAL GUNN DOMAIN DYNAMICS USING A STROBOSCOPIC SEM [J].
MASUDA, M ;
OGURA, T ;
KOYAMA, J .
APPLIED PHYSICS LETTERS, 1978, 33 (10) :888-889
[9]   OPERATIONAL TESTING OF LSI ARRAYS BY STROBOSCOPIC SCANNING ELECTRON MICROSCOPY [J].
PLOWS, GS ;
NIXON, WC .
MICROELECTRONICS AND RELIABILITY, 1971, 10 (05) :317-&