PROGRESS IN CHEMICAL-VAPOR-DEPOSITION

被引:7
作者
CARLSSON, JO [1 ]
JANSSON, U [1 ]
机构
[1] UNIV UPPSALA,DEPT CHEM,THIN FILM & SURFACE CHEM GRP,S-75121 UPPSALA,SWEDEN
关键词
D O I
10.1016/0079-6786(93)90003-A
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
摘要
[No abstract available]
引用
收藏
页码:237 / 292
页数:56
相关论文
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