COMPOSITION PROFILES OF CVD PLATINUM AND PLATINUM SILICIDE BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY

被引：31

作者：

MORABITO, JM ^{[1
]}

RAND, MJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

THIN SOLID FILMS | 1974年 / 22卷 / 03期

关键词：

D O I：

10.1016/0040-6090(74)90300-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：293 / 303

页数：11

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