COMPOSITION PROFILES OF CVD PLATINUM AND PLATINUM SILICIDE BY AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROMETRY

被引：31

作者：

MORABITO, JM ^{[1
]}

RAND, MJ ^{[1
]}

机构：

[1] BELL TEL LABS INC,ALLENTOWN,PA 18103

来源：

THIN SOLID FILMS | 1974年 / 22卷 / 03期

关键词：

D O I：

10.1016/0040-6090(74)90300-9

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：293 / 303

页数：11

共 50 条

[31] APPLICATIONS OF AUGER-ELECTRON SPECTROSCOPY AND SECONDARY ION MASS-SPECTROSCOPY IN SOLAR-ENERGY RESEARCH
KAZMERSKI, LL
TRANSACTIONS OF THE AMERICAN NUCLEAR SOCIETY, 1979, 33 (NOV): : 245 - 246
[32] LOW-PRESSURE STUDIES OF DEHYDROCYCLIZATION OF N-HEPTANE ON PLATINUM CRYSTAL SURFACES USING MASS-SPECTROMETRY, AUGER-ELECTRON SPECTROSCOPY, AND LOW-ENERGY ELECTRON-DIFFRACTION
JOYNER, RW
SOMORJAI, GA
LANG, B
JOURNAL OF CATALYSIS, 1972, 27 (03) : 405 - &
[33] DEPTH PROFILE ANALYSIS OF HYDROGENATED CARBON LAYERS ON SILICON BY X-RAY PHOTOELECTRON-SPECTROSCOPY, AUGER-ELECTRON SPECTROSCOPY, ELECTRON ENERGY-LOSS SPECTROSCOPY, AND SECONDARY ION MASS-SPECTROMETRY
SANDER, P
KAISER, U
ALTEBOCKWINKEL, M
WIEDMANN, L
BENNINGHOVEN, A
SAH, RE
KOIDL, P
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (04): : 1470 - 1473
[34] APPLICATION OF AUGER-ELECTRON SPECTROMETRY TO PLATINUM-OXYGEN SYSTEM AT HIGH-TEMPERATURE
WEBER, B
FUSY, J
CASSUTO, A
JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1974, 71 (11-1) : 1551 - 1553
[35] AN AUGER-ELECTRON SPECTROSCOPY, X-RAY PHOTOELECTRON-SPECTROSCOPY, SECONDARY ION MASS-SPECTROMETRY AND BULK ANALYSIS OF PYROLYTIC BORON-NITRIDE CRUCIBLES AFTER VACUUM BAKING
CHAMBERS, FA
ZAJAC, GW
FLEISCH, TH
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (06): : 1310 - 1315
[36] TEMPERATURE PROGRAMMED DESORPTION OF OXYGEN ADSORBED ON RHENIUM - ANALYSIS BY AUGER-ELECTRON SPECTROMETRY AND MASS-SPECTROMETRY
WEBER, B
ALNOT, M
CASSUTO, A
JOURNAL DE CHIMIE PHYSIQUE ET DE PHYSICO-CHIMIE BIOLOGIQUE, 1976, 73 (04) : 455 - 457
[37] INVESTIGATION OF CHROMIUM, COBALT, AND NICKEL IMPLANTATION IN SILICON USING AUGER-ELECTRON SPECTROMETRY, SECONDARY ION MASS-SPECTROMETRY, RUTHERFORD BACKSCATTERING SPECTROMETRY, AND MONTE-CARLO SIMULATION
BUBERT, H
PALMETSHOFER, L
STINGEDER, G
WIELUNSKI, M
ANALYTICAL CHEMISTRY, 1991, 63 (15) : 1562 - 1570
[38] Composition and distribution profile of uncontrolled impurities in molybdenum analyzed by the auger electron spectroscopy and secondary ion mass spectrometry methods
Aliev, A.A.
Kodirov, T.
2002, Nauka Moscow (47):
[39] Composition and distribution profile of uncontrolled impurities in molybdenum analyzed by the auger electron spectroscopy and secondary ion mass spectrometry methods
Aliev, AA
Kodirov, T
JOURNAL OF COMMUNICATIONS TECHNOLOGY AND ELECTRONICS, 2002, 47 (04) : 433 - 439
[40] The use of scanning electron microscopy, Auger electron spectroscopy, secondary ion mass spectrometry for investigation of structure and elemental composition of the electroinsulating coating
Goncharenko, YD
Evseyev, LA
IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1998, 62 (03): : 496 - 501

← 1 2 3 4 5 →