DIFFERENT MORPHOLOGIES OF ALN THIN-FILMS SYNTHESIZED AT LOW-TEMPERATURE BY PECVD

被引：2

作者：

DURAND, J

AZEMA, N

CROS, B

COT, L

机构：

来源：

JOURNAL DE PHYSIQUE III | 1993年 / 3卷 / 04期

关键词：

D O I：

10.1051/jp3:1993158

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The metal-organic chemical vapor deposition process assisted by a reactive plasma leads to crystalline AlN coatings with a preferential orientation (1010BAR). The crystallite size strongly depends on the plasma frequency and is independent of substrate materials. The coatings have been characterized by X-ray diffraction, infrared and Auger spectroscopies. The AlN/Si interphase has been studied by transmission electron microscopy.

引用

页码：713 / 727

页数：15

共 16 条

[1]

ANTHONY RW, 1984, SOLID STATE CHEM ITS, P174

[2]

AZEMA N, J EUR CERAM SOC, V8, P291

[3] ON PREPARATION OPTICAL PROPERTIES AND ELECTRICAL BEHAVIOUR OF ALUMINIUM NITRIDE [J].

COX, GA ;

CUMMINS, DO ;

KAWABE, K ;

TREDGOLD, RH .

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1967, 28 (04) :543-&

[4] ACOUSTOELECTRIC PARAMETERS OF ALUMINUM NITRIDE EPITAXIAL LAYERS [J].

DOBRYNIN, AV ;

NAIDA, GA ;

NOVOSELOV, VA .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1987, 104 (01) :K47-K51

[5]

FEIL M, 1989, HYBRID CIRCUITS, V18, P29

[6] NONLINEAR OPTICAL SUSCEPTIBILITIES OF AIN FILM [J].

FUJII, Y ;

YOSHIDA, S ;

MISAWA, S ;

MAEKAWA, S ;

SAKUDO, T .

APPLIED PHYSICS LETTERS, 1977, 31 (12) :815-816

[7] ELECTROOPTICAL EFFECT IN ALUMINUM NITRIDE WAVE-GUIDES [J].

GRAUPNER, P ;

POMMIER, JC ;

CACHARD, A ;

COUTAZ, JL .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) :4136-4139

[8] PLASMA CVD OF AMORPHOUS AIN FROM METALORGANIC AL SOURCE AND PROPERTIES OF THE DEPOSITED FILMS [J].

HASEGAWA, F ;

TAKAHASHI, T ;

KUBO, K ;

NANNICHI, Y .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (09) :1555-1560

[9] PLASMA-ENHANCED CHEMICAL VAPOR-DEPOSITION OF AIN COATINGS ON GRAPHITE SUBSTRATES [J].

ITOH, H ;

KATO, M ;

SUGIYAMA, K .

THIN SOLID FILMS, 1987, 146 (03) :255-264

[10] ALN SUBSTRATES WITH HIGH THERMAL-CONDUCTIVITY [J].

KUROKAWA, Y ;

UTSUMI, K ;

TAKAMIZAWA, H ;

KAMATA, T ;

NOGUCHI, S .

IEEE TRANSACTIONS ON COMPONENTS HYBRIDS AND MANUFACTURING TECHNOLOGY, 1985, 8 (02) :247-252

← 1 2 →