AMORPHOUS SOLID SYSTEMS - DIAMOND-LIKE CARBON, CARBIDES, FILMS AND MULTILAYER STRUCTURES

被引:36
作者
DORFMAN, VF
PYPKIN, BN
机构
[1] Institute of Electronic Controlling Machines, 117812 Moscow
关键词
D O I
10.1016/0257-8972(91)90003-F
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Diamond-like films (DLFs) may be considered as (1) a special kind of solid; (2) membranes with connected microscopic pores and (3) a matrix, the properties of which can be varied over a wide range by alloying. In W-Si alloyed DLFs all these structures are found, with resistances from 10(14) to 10(-4) OMEGA cm. They are interesting as examples of percolation phenomena and for their possible practical applications. The expected pore diameter has been estimated at about 0.30-0.35 nm and the pore density at 10(21) cm-3. However, scanning tunnelling microscopy gave evidence of negligible pore density and a metallic state in high tungsten films. Low angle electron and X-ray diffraction, scanning tunnelling microscopy, high voltage (1 MeV) transmission scanning electron microscopy (TSEM) and the analysis of the emissive picture of a W-edge coated with a DLF have demonstrated the presence of a uniform amorphous structure up to the equiatomic proportion C:W. A study has been made of the short-term and long-term temperature stability of DLFs and of their resistance to degradation and oxidation and of their chemical and mechanical durability.
引用
收藏
页码:193 / 198
页数:6
相关论文
共 10 条
[1]  
AKZIPETROV OA, IN PRESS SURF COAT T
[2]  
BOZHKO A, UNPUB
[3]   ON SOME PROPERTIES AND APPLICATIONS OF TUNGSTEN-ALLOYED AMORPHOUS-CARBON FILMS [J].
DORFMAN, VF ;
PYPKIN, BN ;
KHAN, ID ;
AGEEV, VP ;
GLUSHKO, TN ;
KUZMICHEV, AV ;
DUNAEV, BN ;
KIRPILENKO, GG .
SURFACE & COATINGS TECHNOLOGY, 1991, 48 (03) :199-204
[4]  
DORFMAN VF, 1988, J TECH PHYS LETT, V14, P1033
[5]  
DORFMAN VF, IN PRESS SURF COAT T
[6]   ELECTRICAL CHARACTERISTICS OF SCHOTTKY DIODES FABRICATED USING PLASMA ASSISTED CHEMICAL VAPOR-DEPOSITED DIAMOND FILMS [J].
GILDENBLAT, GS ;
GROT, SA ;
WRONSKI, CR ;
BADZIAN, AR ;
BADZIAN, T ;
MESSIER, R .
APPLIED PHYSICS LETTERS, 1988, 53 (07) :586-588
[7]  
KOGEL G, 1988, PHYS REV LETT, V60, P1546
[8]   PROPERTIES OF METAL-CLUSTERS IN POLYMERIZED HYDROCARBON VERSUS FLUOROCARBON MATRICES [J].
LAURENT, C ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1989, 65 (04) :1717-1723
[9]  
RIVIER N, 1981, NUMERICAL METHODS ST, P132
[10]  
WANG M, IN PRESS SURF COAT T