EBIC INVESTIGATIONS OF THICK SOI LAYERS

被引：5

作者：

KITTLER, M ^{[1
]}

TILLACK, B ^{[1
]}

HOPPE, W ^{[1
]}

SEIFERT, W ^{[1
]}

BANISCH, R ^{[1
]}

RICHTER, HH ^{[1
]}

ROCHER, A ^{[1
]}

机构：

[1] CNRS,OPT ELECTR LAB,F-31055 TOULOUSE,FRANCE

来源：

REVUE DE PHYSIQUE APPLIQUEE | 1988年 / 23卷 / 03期

关键词：

D O I：

10.1051/rphysap:01988002303028100

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：281 / 288

页数：8

共 20 条

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