PROBLEMS RELATED TO THE FORMATION OF LATERAL P-N-JUNCTIONS ON CHANNELED SUBSTRATE (100) GAAS FOR LASERS

被引:65
作者
MEIER, HP
BROOM, RF
EPPERLEIN, PW
VANGIESON, E
HARDER, C
JACKEL, H
WALTER, W
WEBB, DJ
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 02期
关键词
D O I
10.1116/1.584394
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
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页码:692 / 695
页数:4
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