共 50 条
- [42] A BATCH-FABRICATED NON-REVERSE VALVE WITH CANTILEVER BEAM MANUFACTURED BY MICROMACHINING OF SILICON SENSORS AND ACTUATORS, 1989, 18 (3-4): : 389 - 396
- [44] ELECTROSTATIC MICRO MIRROR ARRAY WITH BATCH-FABRICATED TORSION BEAM OF SILICON NANO WIRE 2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 1157 - 1160
- [45] VOC sensing using batch-fabricated temperature compensated self-leveling microstructures SENSORS AND ACTUATORS B-CHEMICAL, 2020, 311 (311):
- [47] Spin-torque transfer in batch-fabricated spin-valve magnetic nanojunctions (invited) Sun, J.Z. (jonsun@us.ibm.com), 1600, American Institute of Physics Inc. (93):
- [49] BATCH-FABRICATED MEMS RETARDING POTENTIAL ANALYZER FOR HIGH-ACCURACY ION ENERGY MEASUREMENTS 26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013), 2013, : 661 - 664