DETERMINATION OF DEPTH RESOLUTION FROM MEASURED SPUTTERING PROFILES OF MULTILAYER STRUCTURES - EQUATIONS AND APPROXIMATIONS

被引：47
作者：
HOFMANN, S
机构：
来源：
SURFACE AND INTERFACE ANALYSIS | 1986年 / 8卷 / 02期
关键词：
D O I：
10.1002/sia.740080209
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
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页码：87 / 89
页数：3
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