SYNTHESIS OF A POLYBOROSILAZANE AND ITS CONVERSION INTO INORGANIC-COMPOUNDS

被引：66

作者：

FUNAYAMA, O

KATO, T

TASHIRO, Y

ISODA, T

机构：

[1] Corporate Research and Development Laboratory, Tonen Corporation, Ohi, Saitama

来源：

JOURNAL OF THE AMERICAN CERAMIC SOCIETY | 1993年 / 76卷 / 03期

关键词：

D O I：

10.1111/j.1151-2916.1993.tb03665.x

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

A novel polyborosilazane was synthesized by reacting perhydropolysilazane with trimethyl borate. The chemical structure of this polymer was investigated by the techniques of infrared spectroscopy and nuclear magnetic resonance measurements. Amorphous silicon nitride was obtained by pyrolysis of this polymer in a stream of anhydrous ammonia to 1000-degrees-C with high ceramic yield. The pyrolysis product remained amorphous after additional heating to 1700-degrees-C under N2. Crystallization to alpha-Si3N4 and beta-Si3N4 proceeded with heat treatment at 1800-degrees-C under N2. These results indicate that polyborosilazane is a good precursor for amorphous silicon nitride based materials.

引用

页码：717 / 723

页数：7

共 32 条

[1]

BANEY RH, 1984, MATER SCI RES, V17, P253

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